Onto Innovation Acquires 27% Stake in Rigaku Holdings for $720 Million

By Ahmed Jamerson • Monday, August 10 13:04 • Permanent Link

Onto Innovation has completed its purchase of a 27% minority stake in Rigaku Holdings Corporation for 113,078,356,600 yen, about $720 million.

The deal deepens the collaboration first announced in April 2026 and is aimed at advancing x-ray technologies for semiconductor process control. Onto said the partnership is focused on next-generation applications tied to increasingly complex 3D architectures and exotic materials used in chip manufacturing.

The company said it will account for the investment under the fair value option method and will not consolidate Rigaku’s financial results. Onto will also nominate a director to Rigaku’s board. Today the company's shares have moved -1.44% to a price of $303.86. For more information, read the company's full 8-K submission here.

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